A Piezoelectric Flexural Plate Wave (FPW) Bio-MEMS Sensor with Improved Molecular Mass Detection for Point-of-Care Diagnostics
نویسندگان
چکیده
منابع مشابه
A mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
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In the last two decades, various flexural plate-wave (FPW)-based biosensors with low phase velocity, low operation frequency, high sensitivity, and short response time, have been developed. However, conventional FPW transducers have low fabrication yield because controlling the thickness of silicon/isolation/metal/piezoelectric multilayer floating thin-plate is difficult. Additionally, conventi...
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ژورنال
عنوان ژورنال: Current Directions in Biomedical Engineering
سال: 2019
ISSN: 2364-5504
DOI: 10.1515/cdbme-2019-0067